Fishing – trapping – and vermin destroying
Patent
1994-07-29
1995-09-12
Quach, T. N.
Fishing, trapping, and vermin destroying
437192, 437200, 148DIG19, 20419217, H01L 21283, H01L 21336
Patent
active
054496314
ABSTRACT:
A conductor is fabricated by forming a layer of doped polysilicon on a semiconductor substrate, patterning the layer of doped polysilicon so as to form a conductor, forming a nitrogen-enriched metal film on the conductor, and converting the nitrogen-enriched metal film to a nitrogen-enriched metal silicide film, wherein nitrogen contained in the nitrogen-enriched metal silicide film provides for improved thermal stability thereof.
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Nishiyama, A., et al., "A Thermally Stable Salicide Process . . . ", Jun. 12-13, 1990, VMIC Conf., pp. 310-316.
Georgiou, G., et al., "Thermal Stability Limits of Thin TiSi.sub.2 . . . ", J. Electro Chem. Soc., 141(5), May 1994, pp. 1351-1356.
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Giewont Kenneth J.
Yu Anthony J.
International Business Machines - Corporation
Lau Richard
Mortinger Alison D.
Quach T. N.
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