Process for producing hexafluoroethane and use thereof

Details Process for producing hexafluoroethane and use thereof Process for producing hexafluoroethane and use thereof

2004-08-09

2008-12-23

Parsa, Jafar (Department: 1621)

Organic compounds -- part of the class 532-570 series

Organic compounds

Halogen containing

C570S177000, C570S178000

Reexamination Certificate

active

07468466

ABSTRACT:
A process for producing hexafluoroethane, comprising a step of distilling a crude hexafluoroethane containing chlorine compounds each having two carbon atoms to distill out hexafluoroethane as a top flow from the top of a distillation column and separate a hexafluoroethane mixture containing the chlorine compounds as a bottom flow from the bottom, and a step of contacting the bottom flow with hydrogen fluoride in the gas phase at a temperature of 300 to 500° C. in the presence of a fluorination catalyst to fluorinate the chlorine compounds. This process provides hexafluoroethane which can be used mainly as a cleaning gas in the production process of a semiconductor device.

REFERENCES:
patent: 2002/0183568 (2002-12-01), Ohno et al.
patent: 2003/0157800 (2003-08-01), Ohno et al.
patent: WO 01/98240 (2001-12-01), None
patent: WO 02/18305 (2002-03-01), None
patent: WO 03/014047 (2003-02-01), None

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