Ultra thin back-illuminated photodiode array fabrication...

Details Ultra thin back-illuminated photodiode array fabrication... Ultra thin back-illuminated photodiode array fabrication...

2005-05-24

2008-12-09

Louie, Wai-Sing (Department: 2814)

Semiconductor device manufacturing: process

Bonding of plural semiconductor substrates

Thinning of semiconductor substrate

C438S022000, C438S048000, C438S963000

Reexamination Certificate

active

07462553

ABSTRACT:
Ultra thin back-illuminated photodiode array fabrication methods providing backside contact by diffused regions extending through the array substrate. In accordance with the methods, a matrix is diffused into one surface of a substrate, and at a later stage of the substrate processing, the substrate is reduced in thickness and a similar matrix is diffused into the substrate from the other side, this second diffusion being aligned with the first and contacting the first within the substrate. These two contacting matrices provide good electrical contact to a conductive diffusion on the backside for a low resistance contact to the backside. Various embodiments are disclosed.

REFERENCES:
patent: 4144096 (1979-03-01), Wada et al.
patent: 4963971 (1990-10-01), Rosetti et al.
patent: 5072312 (1991-12-01), Schwarzbauer et al.
patent: 5075748 (1991-12-01), Hisa
patent: 5538564 (1996-07-01), Kaschmitter
patent: 5670383 (1997-09-01), Piccone et al.
patent: 6111305 (2000-08-01), Yoshida et al.
patent: 6184100 (2001-02-01), Arai
patent: 6426991 (2002-07-01), Mattson et al.
patent: 6504178 (2003-01-01), Carlson et al.
patent: 6653164 (2003-11-01), Miida
patent: 6707046 (2004-03-01), Possin et al.
patent: 6777729 (2004-08-01), Prince et al.
patent: 6933489 (2005-08-01), Fujii et al.
patent: 2002/0000562 (2002-01-01), Carlson et al.
patent: 2002/0020846 (2002-02-01), Pi et al.
patent: 2002/0058353 (2002-05-01), Merrill
patent: 2002/0148967 (2002-10-01), Iwanczky et al.
patent: 2003/0209652 (2003-11-01), Fujii et al.
patent: 2004/0032026 (2004-02-01), Yang et al.
patent: 2004/0104351 (2004-06-01), Shibayama
patent: 2004/0129992 (2004-07-01), Shibayama
Derenzo, Stephen E., “Initial Characterization of a BGO-Photodiode Detector for High Resolution Positron Emission Tomography”, Feb. 1984, IEEE Transactions on Nuclear Science, vol. NS-31, No. 1, pp. 620-626.
Takahashi, Tetsuhiko et al., “Design of Integrated Radiation Detectors with a-Si Photodiodes on Ceramic Scintillators for use in X-Ray Computed Tomography”, Jun. 1990, IEEE Transactions on Nuclear Science, vol. 37, No. 3, pp. 1478-1482.
Burns, H. N. “Buck” et al., “Compact, 625-channel scannerless imaging laser radar receiver”, 1996, Proc. SPIE, vol. 2748, pp. 39-46.
Iwanczyk, J.S. et al., “Simulation and modelling of a new silicon X-ray drift detector design for synchrotron radiation applications”, 1996, Nuclear Instruments and Methods in Physics Research, Section A, vol. 380, pp. 288-294.
Kwa, Tommy A. et al., “Backside-Illuminated Silicon Photodiode Array for an Integrated Spectrometer”, May 1997, IEEE Transactions on Electron Devices, vol. 44, No. 5, pp. 761-765.
Holland, S.E. et al., “Development of Low Noise, Back-Side Illuminated Silicon Photodiode Arrays”, Jun. 1997, IEEE Transactions on Nuclear Science, vol. 44, No. 3, pp. 443-447.
Patt, B.E. et al., “High Resolution CsI(T1)/Si-PIN Detector Development for Breast Imaging”, Aug. 1998, IEEE Transactions on Nuclear Science, vol. 45, No. 4, pp. 2126-2131.
Vishay Semiconductors S268P Data Sheet, “Silicon PIN Photodiode Array”, May 20, 1999, Document No. 81538, pp. 1-5.
Detection Technology, Inc., “New Photodiode Array Products for Computer Tomography-Detectors”, News Bulletin for the Customers and Cooperation Partners, Winter 2000-2001.
Patt, B.E. et al., “Fast-Timing Silicon Photodetectors”, Jun. 2000, IEEE Transactions on Nuclear Science, vol. 47, No. 3, pp. 957-964.
Yang, Min et al., “High Speed Silicon Lateral Trench Detector on SOI Substrate”, International Electron Devices Meeting, Dec. 2-5, 2001, New York, NY, IEDM Technical Digest, pp. 24.1.1-24.1.4, IEEE, US.
Hamamatsu Photonics K.K., Solid State Division, “Si Photodiode Catalog”, Feb. 2002, pp. 1-25.
Tornai, Martin P. et al., “A novel silicon array designed for intraoperative charged particle imaging”, Nov. 2002, Medical Physics, vol. 29, No. 11, pp. 2529-2540.
Luhta, Randy et al., “Back Illuminated Photodiodes for Multislice CT”, Feb. 15-20, 2003, San Diego, California USA.

Affiliated with

Also associated with

Rating

Ultra thin back-illuminated photodiode array fabrication... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Ultra thin back-illuminated photodiode array fabrication..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Ultra thin back-illuminated photodiode array fabrication... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4046768