Thin-film capacitor and method for fabricating the same,...

Details Thin-film capacitor and method for fabricating the same,... Thin-film capacitor and method for fabricating the same,...

2006-03-31

2008-11-25

Lee, Calvin (Department: 2892)

Semiconductor device manufacturing: process

Making passive device

Stacked capacitor

Reexamination Certificate

active

07456078

ABSTRACT:
The thin-film capacitor comprises a capacitor part20formed over a base substrate10and including a first capacitor electrode14, a capacitor dielectric film16formed over the first capacitor electrode14, and a second capacitor electrode18formed over the capacitor dielectric film16; leading-out electrodes26a,26blead from the first capacitor electrode14or the second capacitor electrode18and formed of a conducting barrier film which prevents the diffusion of hydrogen or water; and outside connection electrodes34a,34bfor connecting to outside and connected to the leading-out electrodes26a,26b.

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German Office Action dated Jan. 26, 2007, Application No. 10 2006 013 812.0-34.

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