Sensor for monitoring material deposition

Details Sensor for monitoring material deposition Sensor for monitoring material deposition

2005-01-31

2008-11-04

Kackar, Ram N. (Department: 1792)

Coating apparatus

With indicating, testing, inspecting, or measuring means

C427S009000, C427S010000, C427S248100, C073S204270, C073S514330

Reexamination Certificate

active

07445675

ABSTRACT:
A sensor for detecting an amount of material deposition. The sensor includes a substrate, a heater disposed on the substrate, and a temperature sensor. The heat and the temperature sensor are separated from one another by a gap.

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