Coupled resonator filters formed by micromachining

Details Coupled resonator filters formed by micromachining Coupled resonator filters formed by micromachining

2003-11-07

2008-11-11

Pascal, Robert J. (Department: 2817)

Wave transmission lines and networks

Coupling networks

Wave filters including long line elements

C333S230000

Reexamination Certificate

active

07449979

ABSTRACT:
A resonator filter assembly is provided having a first wafer (102), a second wafer (104) and a third wafer (106). A plurality of pits are etched in the first and second wafer (102, 104) and arranged such that a plurality of resonant cavities (108) are formed with a coupling cavity (110) disposed between the resonant cavities (108). By altering the dimensions of the resonant and coupling cavities (108, 110), the frequency characteristics of the filter can be adjusted as desired.

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