Silicon mirrors having reduced hinge stress from temperature...

Details Silicon mirrors having reduced hinge stress from temperature... Silicon mirrors having reduced hinge stress from temperature...

2002-05-03

2008-12-23

Pritchett, Joshua L (Department: 2872)

Optical: systems and elements

Deflection using a moving element

Pivotal or rotational element

C359S223100

Reexamination Certificate

active

07468826

ABSTRACT:
A device such as a mirror assembly comprises a movable structure (41) having a first movable portion (45) hinged to a frame portion (43) by a first pair of torsional hinges (47A and47B) spaced apart along a first axis (49). The device may also have a second movable portion (51) and a second pivot axis provided by set of torsional hinge (53A and53B). The movable structure or mirror assembly (41) having a first coefficient of expansion is attached to a support structure (42) having a different coefficient of expansion at a single attaching or anchor point (63) such as by epoxy or a clamp (101). The single attaching point (63) allows expansion and/or contraction along two dimensions and thereby prevents compression and/or tension forces resulting from different coefficients of expansion between the mirror assembly41and the support structure42from being applied to the torsional hinges47A,47B,53A and53B. One embodiment of the invention also includes a biasing member or finger (105) which bears against the frame portion43of mirror assembly41to prevent vibrations in the third dimension.

REFERENCES:
patent: 5650881 (1997-07-01), Hornbeck
patent: 5969465 (1999-10-01), Neukermans et al.
patent: 6040935 (2000-03-01), Michalicek
patent: 6428173 (2002-08-01), Dhuler et al.
patent: 6519075 (2003-02-01), Carr et al.
patent: 6706202 (2004-03-01), Sun et al.
patent: 6735004 (2004-05-01), Hagelin et al.

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