Micro mirrors with piezoelectric release mechanism

Details Micro mirrors with piezoelectric release mechanism Micro mirrors with piezoelectric release mechanism

2006-03-01

2008-11-18

Lester, Evelyn A. (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S295000, C359S298000, C359S323000, C345S085000, C345S108000, C348S770000, C348S771000

Reexamination Certificate

active

07453621

ABSTRACT:
A spatial light modulator includes a substrate; a hinge in connection with the substrate; a mirror plate that is connected with the hinge and is configured to tilt about the hinge; and a piezoelectric device coupled with the substrate. The piezoelectric device is configured to produce an acoustic wave to assist the separation between the mirror plate and the object.

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patent: 2005/0128564 (2005-06-01), Pan
patent: 2006/0049826 (2006-03-01), Daneman et al.
patent: 2008/0062503 (2008-03-01), Pan et al.

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