Energy-filtering cathode lens microscopy instrument

Details Energy-filtering cathode lens microscopy instrument Energy-filtering cathode lens microscopy instrument

2006-02-28

2008-11-18

Vanore, David A. (Department: 2881)

Radiant energy

Electron energy analysis

C250S310000, C250S3960ML

Reexamination Certificate

active

07453062

ABSTRACT:
An energy filtering microscopy instrument is provided. An objective lens is disposed for reception of electrons in order to form an electron diffraction pattern in a backfocal plane of the objective lens. An entrance aperture disposed in the backfocal plane of the objective lens for filtering a slice of the electron diffraction pattern. A magnetic deflector has an entrance plane and an exit plane. The entrance aperture is disposed in the entrance plane. The magnetic deflector is disposed to receive the slice of the electron diffraction pattern and project an energy dispersed electron diffraction pattern to the exit plane. An exit aperture is disposed in the exit plane of the magnetic deflector for selection of desired electron energy of the energy dispersed electron diffraction pattern.

REFERENCES:
patent: 5319207 (1994-06-01), Rose et al.
patent: 6002740 (1999-12-01), Cerrina et al.
patent: 7022987 (2006-04-01), Preikszas et al.

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