Method for fabricating a microscale anemometer

Details Method for fabricating a microscale anemometer Method for fabricating a microscale anemometer

2005-05-18

2008-11-18

Kim, Paul D (Department: 3729)

Metal working

Method of mechanical manufacture

Electrical device making

C029S592100, C029S593000, C029S611000, C073S204110, C073S204220, C073S204260, C073S861850

Reexamination Certificate

active

07451537

ABSTRACT:
Method for fabricating a microscale anemometer on a substrate. A sacrificial layer is formed on the substrate, and a metal thin film is patterned to form a sensing element. At least one support for the sensing element is patterned. The sacrificial layer is removed, and the sensing element is lifted away from the substrate by raising the supports, thus creating a clearance between the sensing element and the substrate to allow fluid flow between the sensing element and the substrate. The supports are raised preferably by use of a magnetic field applied to magnetic material patterned on the supports.

REFERENCES:
patent: 4189708 (1980-02-01), Bryll
patent: 4393697 (1983-07-01), Sato et al.
patent: 4538457 (1985-09-01), Gneiss et al.
patent: 4604895 (1986-08-01), Watkins
patent: 4864855 (1989-09-01), Shiraishi et al.
patent: 5020365 (1991-06-01), Gneiss
patent: 5024083 (1991-06-01), Inada et al.
patent: 5148707 (1992-09-01), Inada et al.
patent: 5371461 (1994-12-01), Hedengren
patent: 02057773 (1990-02-01), None
Z. Fan, J. Chen, J. Zou, D. Bullen, C. Liu, F. Delcomyn, “Design and Fabrication of Artificial Lateral-Line Flow Sensors,” Journal of Micromechanics and Microengineering, vol. 12, No. 5, pp. 655-661, Sep. 2002.
Y. Ozaki, T. Ohyama, T. Yasuda, I. Shimoyama, “An air flow sensor modeled on wind receptor hairs of insects,” Proc. MEMS 2000, pp. 1-6, Miyazaki, Japan.
F. Jiang, Y.C. Tai, C.M. Ho, and W.J. Li, “A Micromachiend Polysilicon Hot-Wire Anemometer,” Technical Digest, Solid-State Sensor and Actuator Workshop, Hilton Head Island, SC, Jun. 13-26, pp. 264-267, 1994.
T. Ebefors, E. Kalvesten, G. Stemme, “Three Dimensional Silicon Triple Hot Wire Anemometer Based On Polyimide Joints” Proc. MEMS '98, pp. 93-98, 1998.
D. Dittmann, R. Ahrens, Z. Rummler, K. Scholote-Holubek, and W.K. Schomburg, “Low-cost flow transducer fabricated with the Amanda-process,” 11thInternational Conference on Solid-State Sensors and Actuators, Munich, Germany, Jun. 10-14, pp. 1472-1475, 2001.
HD Microsystems, “Pyralin Polyimide Coating for Electronics: PI2610 Series—Product Information and Process Guidelines,” HD Microsystems, Jul. 1998.
F. Jiang, Y.C. Tai, C.M. Ho, R. Karan, and M. Garstenauer, “Theoretical and Experimental Studies of Micromachined Hot-Wire Anemometers,” Technical Digest, International Electron Devices Meeting (IEDM), San Francisco, 1994, pp. 139-142.
T. Neda, K. Nakamura, and T. Takumi, “A Polysilicon Flow Sensor For Gas Flow Meters,” Sensors and Actuators A-Physical, vol. A54, No. 1-3, pp. 621-631, Jun. 1996.
J. Zou, J. Chen, C. Liu, and J.E. Schutt-Aine, “Plastic Deformation Magnetic Assembly (PDMA) of Out-of-Plane Microstructures: Technology and Application,” IEEE/ASME Journal of Micro Electromechanical Systems, vol. 10, No. 2, pp. 302-309, Jun. 2001.
A.F. Mayadas, M. Shatzkes and J.F. Janak, “Electrical Resistivity Model For Polycrystalline Films: The Case of Specular Reflection at External Surfaces.” Applied Physics Letters, vol. 14, p . 343-347, 1969.
S. Sedky et al., “Experimental Determination of the Maximum Post-Process Annealing Temperature for Standard CMOS Wafers,” IEEE Transactions on Electron Devices, vol. 48, No. 2, pp. 377-385, 2001.
J. Chen, J. Zou, and C. Liu, “A Surface Micromachined, Out-Of-Plane Anemometer,” Proceedings MEMS, Las Vegas, 2002, pp. 332-335.
S.A. Chambers and K.K. Chakravorty, “Oxidation at the Polyimide/Cu Interface,” Journal of Vacuum Science and Technology A—Vacuum Surface & Films, vol. 6, No. 5, pp. 3008-3011, Sep. 1988.
Y. Nakamura, Y. Suzuki, and Y. Watanabe, “Effect of Oxygen Plasma Etching on Adhesion Between Polyimide Films and Metal,” Thin Solid Films, vol. 290, pp. 367-369, 1996.
P.D. Weidman and F.K. Browand, “Analysis of a Simple Circuit for Constant Temperature Anemometry,” Journal of Physics E—Scientific Instruments, vol. 8, No. 2, pp. 553-560, Jul. 1975.

Affiliated with

Also associated with

Rating

Method for fabricating a microscale anemometer does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Method for fabricating a microscale anemometer, we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for fabricating a microscale anemometer will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-4036652