Exposure apparatus, coatings for exposure apparatus,...

Details Exposure apparatus, coatings for exposure apparatus,... Exposure apparatus, coatings for exposure apparatus,...

2005-01-12

2008-11-11

Nguyen, Hung Henry (Department: 2851)

Photocopying

Projection printing and copying cameras

Step and repeat

C355S030000

Reexamination Certificate

active

07450217

ABSTRACT:
A coating for sensors and/or parts of an exposure apparatus, for example a sensor on a substrate table of a lithography apparatus, include a semiconductor, a photocatalyst, and/or a metal oxide.

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