Micromachined comb capacitive accelerometer

Details Micromachined comb capacitive accelerometer Micromachined comb capacitive accelerometer

2005-12-19

2008-11-04

Chapman, John E (Department: 2856)

Measuring and testing

Speed, velocity, or acceleration

Acceleration determination utilizing inertial element

C438S050000

Reexamination Certificate

active

07444873

ABSTRACT:
A comb capacitive accelerometer comprising a substrate, a mobile electrode relative to said substrate fitted with a plurality of mobile fingers, an electrode fixed relative to said substrate fitted with a plurality of fixed fingers, each of said mobile fingers being positioned between two contiguous fixed fingers so as to form a microstructure with interdigital combs. According to the invention the mobile fingers are connected to one another by at least a first connecting beam etched directly into the substrate, and/or the fixed fingers are connected to one another by at least a second connecting beam etched directly in the substrate.

REFERENCES:
patent: 4653326 (1987-03-01), Danel et al.
patent: 6105428 (2000-08-01), Schmiesing et al.
patent: 199 28 291 A 1 (1999-12-01), None
patent: 2 558 263 (1985-07-01), None
patent: 10-2911 (1998-01-01), None

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