Modular sensor assembly and methods of fabricating the same

Details Modular sensor assembly and methods of fabricating the same Modular sensor assembly and methods of fabricating the same

2006-12-11

2008-11-18

Raevis, Robert R (Department: 2856)

Measuring and testing

Vibration

By mechanical waves

Reexamination Certificate

active

07451651

ABSTRACT:
A modular sensor assembly and methods of fabricating a modular sensor assembly are provided. The modular sensor assembly includes a sensor array coupled to an electronics array in a stacked configuration. The sensor array comprises a plurality of sensor modules, each comprising a plurality of sensor sub-arrays. The electronics array comprises a plurality of integrated circuit modules, each comprising a plurality of integrated circuit chips. The sensor modules may be coupled to the electronics modules via flip chip technology.

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