Incremental printing of symbolic information – Ink jet – Controller
Reexamination Certificate
2003-10-22
2008-12-09
Luu, Matthew (Department: 2861)
Incremental printing of symbolic information
Ink jet
Controller
C347S009000, C347S037000
Reexamination Certificate
active
07461912
ABSTRACT:
A device manufacturing apparatus includes a discharge head discharging a droplet containing a functional material, a stage supporting a substrate on which the droplet is discharged, and which is capable of moving relative to the discharge head, a carrier carrying the substrate, a detector detecting a discharge condition of the droplet which is discharged from a discharge nozzle formed in the discharge head, and a controller executing a detection operation by the discharge device during a carrying operation of the substrate.
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Kamiyama Nobuaki
Takahashi Hayato
Harness & Dickey & Pierce P.L.C.
Lebron Jannelle M
Luu Matthew
Seiko Epson Corporation
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