Photocopying – Projection printing and copying cameras – With temperature or foreign particle control
Reexamination Certificate
2005-09-27
2008-11-18
Nguyen, Kiet T (Department: 2881)
Photocopying
Projection printing and copying cameras
With temperature or foreign particle control
C355S053000, C355S075000
Reexamination Certificate
active
07453549
ABSTRACT:
A position measurement device29measures the position of a position measurement mark26formed on the lower surface of a reticle1, thereby measuring the position of the reticle1. A position measurement device30measures the position of the position measurement mark27formed on the lower surface of a lower lid2b, thereby measuring the position of the lower lid2b. The relative displacement of the reticle1and lower lid2bis known when the position of the reticle1and the position of the lower lid2bare known. Therefore, when the lower lid2bhaving the reticle1loaded thereon is carried with a carrying device and set in an exposure device, the stop position of the lower lid2bis determined by taking this displacement into account. As a result, the reticle1can be correctly set in the exposure device.
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Okubo Yukiharu
Suzuki Motoko
Finnegan Henderson Farabow Garrett & Dunner
Nguyen Kiet T
Nikon Corporation
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