Three-dimensional face-to-face integration assembly

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified configuration

Reexamination Certificate

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Details

C257S773000, C257S777000, C257S782000, C438S455000, C438S637000, C438S667000, C438S672000, C438S675000

Reexamination Certificate

active

07453150

ABSTRACT:
A via for connecting metallization layers of chips bonded in a face-to-face configuration is provided, as well as methods of fabricating the via. The via may function as an interconnection of metallization layers in three-dimensional, stacked, integrated circuits, and may enable high density, low-resistance interconnection formation.

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