Modular fluid distribution system

Details Modular fluid distribution system Modular fluid distribution system

2004-07-09

2008-12-02

Huson, Gregory L. (Department: 3753)

Fluid handling

Systems

With flow control means for branched passages

Reexamination Certificate

active

07458397

ABSTRACT:
A modular system for enabling a distribution of fluids, including a plurality of individual fluid path blocks that can be joined to substrate plates and component interfacing blocks to form gas sticks and gas panels. Each gas path block will have a fluid passageway with an entrance port and exit port accessing a common surface. Active components are mounted to the interfacing blocks, with each gas path block extending and interconnecting across immediately adjacent components in a stick or immediately adjacent sticks. Alignment features are provided to ensure that entrance and exit ports are accurately positioned to facilitate sealing.

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