Electric heating – Metal heating – By arc
Reexamination Certificate
2004-08-23
2008-11-25
Evans, Geoffrey S (Department: 3742)
Electric heating
Metal heating
By arc
C219S121710, C219S121830
Reexamination Certificate
active
07456372
ABSTRACT:
There is provided a laser processing apparatus, a multilayer printed wiring board manufacturing apparatus, and a manufacturing method to form via holes of ultra-fine diameter. The laser beam from the CO2laser oscillator (60) is converted to the shortened wavelength beam by a tellurium crystal (94) to control diffraction of the laser beam. Simultaneously, when the laser beam is condensed, a limit value of the condensation limit is reduced. Thereby, the spot diameter of laser beam is reduced and a hole for via hole is bored on the interlayer insulation resin on a substrate (10). Therefore, even when the laser beam output is raised to form a deeper hole, the hole diameter is not widened and thereby a hole for a small diameter via hole can be formed.
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Evans Geoffrey S
Ibiden Co. Ltd.
Oblon & Spivak, McClelland, Maier & Neustadt P.C.
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