Method of and system for monitoring the functionality of a...

Details Method of and system for monitoring the functionality of a... Method of and system for monitoring the functionality of a...

2006-10-27

2008-11-18

Nguyen, Ha (Department: 2829)

Electricity: measuring and testing

Measuring, testing, or sensing electricity, per se

With rotor

C324S758010

Reexamination Certificate

active

07453261

ABSTRACT:
A method of monitoring the functionality of a wafer probe is disclosed. The method comprises applying a multi-site probe to a plurality of semiconductor dies; comparing the failure rate of a first probe site of the multi-site probe with the failure rate of a second probe site of the multi-site probe for a test of the plurality of semiconductor dies; and determining that a probe site of the multi-site probe is defective based upon comparing the failure rate of the first probe site of the multi-site probe with the failure rate of the second probe site of the multi-site probe. A system for monitoring the functionality of a wafer probe site is disclosed.

REFERENCES:
patent: 6281694 (2001-08-01), Tsai
patent: 6717430 (2004-04-01), Burch
patent: 6764866 (2004-07-01), Lin et al.
patent: 7112979 (2006-09-01), Arabi et al.
patent: 7230439 (2007-06-01), Tan
patent: 7388393 (2008-06-01), Yamamoto
patent: 2002/0049554 (2002-04-01), Miller
patent: 2005/0212538 (2005-09-01), Oborny

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