Chemical mechanical polishing pad

Details Chemical mechanical polishing pad Chemical mechanical polishing pad

2004-11-02

2008-10-28

Ackun, Jr., Jacob K (Department: 3728)

Abrading

Flexible-member tool, per se

C451S921000

Reexamination Certificate

active

07442116

ABSTRACT:
A chemical mechanical polishing pad having a face for polishing an object to be polished, a non-polishing face opposite to the face and a side face for interconnecting these faces and including the pattern of recessed portions which are formed on the non-polishing face and are open to the non-polishing face but not on the side face.

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