Optics: measuring and testing – Inspection of flaws or impurities – Surface condition
Reexamination Certificate
2006-03-01
2008-10-14
Lauchman, L. G. (Department: 2877)
Optics: measuring and testing
Inspection of flaws or impurities
Surface condition
C356S237500, C356S237200
Reexamination Certificate
active
07436506
ABSTRACT:
A system for inspecting specimens such as semiconductor wafers is provided. The system provides scanning of dual-sided specimens using a damping arrangement which filters unwanted acoustic and seismic vibration, including an optics arrangement which scans a first portion of the specimen and a translation or rotation arrangement for translating or rotating the specimen to a position where the optics arrangement can scan the remaining portion(s) of the specimen. The system further includes means for stitching the scans together, thereby providing both damping of the specimen and the need for smaller and less expensive optical elements.
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Bevis Christopher F.
Hansen Hans J.
Kavaldjiev Daniel Ivanov
Kren George
Shortt David W.
KLA-Tencor Corporation
Lauchman L. G.
Smyrski Law Group, A P.C.
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