Semiconductor device having via connecting between...

Active solid-state devices (e.g. – transistors – solid-state diode – Combined with electrical contact or lead – Of specified material other than unalloyed aluminum

Reexamination Certificate

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Details

C257S750000, C257S752000, C257S758000, C257S773000, C257S774000, C257S775000, C257S776000, C257SE23145, C257SE29119, C438S598000, C438S601000, C438S623000

Reexamination Certificate

active

07439623

ABSTRACT:
A first insulating film is provided between a lower interconnect and an upper interconnect. The lower interconnect and the upper interconnect are connected to each other by way of a via formed in the first insulating film. A dummy via or an insulating slit is formed on/in the upper interconnect near the via.

REFERENCES:
patent: 6717267 (2004-04-01), Kunikiyo
patent: 6919637 (2005-07-01), He et al.
patent: 2002/0145201 (2002-10-01), Armbrust et al.
patent: 1304175 (2001-07-01), None
patent: 2000-012688 (2000-01-01), None
patent: 2000-331991 (2000-11-01), None
patent: 2002-033384 (2002-01-01), None
patent: 2002-299437 (2002-10-01), None
Chinese Office Action Issued in Chinese Patent Application No. CN 200410096561.2, dated Jul. 13, 2007.

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