Turbomolecular vacuum pump

Electrical generator or motor structure – Dynamoelectric – Rotary

Reexamination Certificate

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Details

C310S06800R, C310S071000, C417S423400

Reexamination Certificate

active

07436093

ABSTRACT:
The turbomolecular vacuum pump with active magnetic bearings comprises an enclosure (110) defining a primary vacuum chamber (116), a rotor (120), an electric motor (107), an axial magnetic bearing (103), radial magnetic bearings (101, 102), an axial detector (106), and radial detectors (104, 105). Remote external electric circuits associated with the electric motor (107) and with the axial and radial magnetic bearings (103and101, 102) essentially comprise power supply electric circuits (191). Circuits (194) for controlling the axial and radial magnetic bearings (103and101, 102) from signals issued by the axial and radial detectors (106and104, 105) are embedded in a resin and placed inside the enclosure (110) in the primary vacuum chamber (116). A hermetic leaktight electrical connector (180) and an electric cable (183, 184) providing a connection with the remote external electric circuits (191, 192) each have a number of connection wires that is less than ten.

REFERENCES:
patent: 4023920 (1977-05-01), Bachler et al.
patent: 4082376 (1978-04-01), Wehde et al.
patent: 5032751 (1991-07-01), Morita
patent: 5469007 (1995-11-01), Toyama
patent: 6644938 (2003-11-01), Omori
patent: 6793466 (2004-09-01), Miyamoto
patent: 7090469 (2006-08-01), Blumenthal et al.
patent: 2 747 431 (1997-10-01), None
patent: 1 195994 (1989-08-01), None

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