Optics: measuring and testing – Dimension
Reexamination Certificate
2005-04-28
2008-08-26
Nguyen, Sang (Department: 2886)
Optics: measuring and testing
Dimension
C250S559290, C250S23700G
Reexamination Certificate
active
07417748
ABSTRACT:
A method of measuring dimensional changes in a transparent substrate includes forming an array of reference markers on a reference plate, forming an array of substrate markers on the transparent substrate, stacking the reference plate and transparent substrate such that the reference markers and substrate markers overlap, measuring coordinates of the substrate markers relative to coordinates of the reference markers before and after processing the transparent substrate, and determining dimensional changes in the transparent substrate from the difference between the measured relative coordinates of the substrate markers before and after processing the transparent substrate.
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Fox Richard L.
Kang Kiat C.
Prescod Andru J. A.
Adebiyi Adenike
Chen Siwen
Corning Incorporated
Nguyen Sang
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