Liquid processing apparatus and method

Details Liquid processing apparatus and method Liquid processing apparatus and method

2006-10-11

2008-08-19

Perrin, Joseph L (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

With means to movably mount or movably support the work or...

C134S198000, C134S200000, C134S902000, C156S345210, C156S345550

Reexamination Certificate

active

07412981

ABSTRACT:
A liquid processing apparatus includes containers26, 27, 26a, 26bsurrounding processing chambers51, 52for accommodating a plurality of wafers W and nozzles54, 56for supplying a processing liquid to the substrates W in order to perform a liquid process. The nozzles54, 56are respectively equipped with a plurality of ejecting orifices53, 55capable of ejecting the processing liquid in a plane manner, allowing the substrates W to be processed uniformly and effectively.

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Korean Office Action, issued Apr. 26, 2006.

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