Multi-scale cantilever structures having nano sized holes...

Details Multi-scale cantilever structures having nano sized holes... Multi-scale cantilever structures having nano sized holes...

2006-10-26

2008-10-07

Pert, Evan (Department: 2826)

Active solid-state devices (e.g., transistors, solid-state diode

Responsive to non-electrical signal

C257S415000, C257S421000, C257SE31001, C438S050000, C438S052000

Reexamination Certificate

active

07432571

ABSTRACT:
Provided are a multi-scale cantilever structure having nano-sized holes prepared by anodic oxidation and a method of preparing the same. The multi-scale cantilever structure is prepared using anodic oxidation and electro-polishing so that a manufacturing process is simple and a manufacturing cost is inexpensive. In addition, the multi-scale cantilever structure has a porous structure having a plurality of nano-sized holes inside thereof, and thus a surface area of the cantilever structure can be maximized. Therefore, when the cantilever structure is used in a sensor, the sensor can have improved sensitivity and selectivity.

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