Fluid handling – Processes – With control of flow by a condition or characteristic of a...
Reexamination Certificate
2004-07-09
2008-08-19
Rivell, John (Department: 3753)
Fluid handling
Processes
With control of flow by a condition or characteristic of a...
C137S487500, C137S486000, C137S002000, C073S001160, C073S861430
Reexamination Certificate
active
07412986
ABSTRACT:
Systems and methods for flow verification and validation of mass flow controllers are disclosed. A mass flow controller may be commanded to a specified flow and flow measurement commenced. Gas is accumulated in a first volume and while measurements are taken within this volume. Gas may then flow into a second volume while measurements are taken. The various measurements taken during the two intervals may then be used to calculate the flow rate. The flow rate, in turn, may be used to determine the accuracy of the mass flow controller relative to a setpoint. Additionally, these systems and methods may utilize only one volume to perform flow verification by flowing gas into this volume, taking measurements, and calculating the flow rate based only upon this set of measurements.
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Barker James
Sukumaran Sandeep
Tison Stuart A.
Celerity, Inc.
Lowrie Lando & Anastasi, LLP
Price Craig
Rivell John
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