Methods and apparatus for a MEMS gyro sensor

Measuring and testing – Speed – velocity – or acceleration – Angular rate using gyroscopic or coriolis effect

Reexamination Certificate

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C073S504120

Reexamination Certificate

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07434464

ABSTRACT:
A gyro sensor configured to sense an angular rate about a rotational axis includes a drive mass configured to undergo oscillatory linear motion within a plane, and a sense mass configured to undergo an oscillatory motion out of the plane as a function of the angular rate. A link spring component connects the sense mass to the drive mass such that the sense mass is substantially decoupled from the drive mass with respect to the oscillatory linear motion of the drive mass, but is coupled to the drive mass with respect to the oscillatory motion out of the plane of the sense mass.

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Acar, Cenik, et al, Inherently Robust Micromachined Gyroscopes with 2-DOF Sense-Mode Oscillator, Journal of Microelectromechanical Systems, vol. 15., No. 2, pp. 380-387. Apr. 2006.
Gomez, U.M., et al, New Surface Micromachined Angular Rate Sensor For Vehicle Stabilizing Systems In Automotive Applications, Robert Bosch GmbH, Germany.
Gomez, U.M., et al, New Surface Micromachined Angular Rate Sensor For Vehicle Stabilizing Systems In Automotive Applications, Robert Bosch GmbH, Germany, no date available.

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