Optical: systems and elements – Optical modulator – Light wave temporal modulation
Reexamination Certificate
2006-08-17
2008-10-28
Choi, William C (Department: 2873)
Optical: systems and elements
Optical modulator
Light wave temporal modulation
C359S224200, C359S198100
Reexamination Certificate
active
07443569
ABSTRACT:
The invention provides a micro-electro-mechanical-system (MEMS) mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end, and having a flexible connection at a second end opposite the first end. The invention also provides a MEMS mirror device, comprising: a mirror having a 2-dimensional rotational T-shaped hinge at a first end; and a vertical actuator connected to the 2-dimensional T-shaped hinge through a rigid connection. The invention also provides a MEMS mirror device, comprising: a mirror connected to a first end of a rotational actuator through bending springs at a first end, and having a torsional spring at a second end opposite the first end; a movable cantilever connected to the mirror through the torsional spring; and a support structure connected to the first end and a second end of the rotational actuator through torsional springs and connected to the movable cantilever.
REFERENCES:
patent: 6431714 (2002-08-01), Sawada et al.
Ducellier Thomas
Hnatiw Alan
Mala Mohiuddin
Choi William C
JDS Uniphase Corporation
MacLean Doug
Teitelbaum Neil
Teitelbaum & MacLean
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