Simulation program for integrated optical/electronic circuit

Details Simulation program for integrated optical/electronic circuit Simulation program for integrated optical/electronic circuit

2002-02-15

2008-08-05

Rodriguez, Paul L (Department: 2123)

Data processing: structural design, modeling, simulation, and em

Simulating electronic device or electrical system

Circuit simulation

C716S030000

Reexamination Certificate

active

07409327

ABSTRACT:
A method for forming a hybrid active electronic and optical circuit using a lithography mask. The hybrid active electronic and optical circuit comprising an active electronic device and at least one optical device on a Silicon-On-Insulator (SOI) wafer. The SOI wafer including an insulator layer and an upper silicon layer. The upper silicon layer including at least one component of the active electronic device and at least one component of the optical device. The method comprising projecting the lithography mask onto the SOI waver in order to simultaneously pattern the component of the active electronic device and the component of the optical device on the SOI wafer.

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