Test apparatus for semiconductor elements on a semiconductor...

Details Test apparatus for semiconductor elements on a semiconductor... Test apparatus for semiconductor elements on a semiconductor...

2007-04-17

2008-10-14

Nguyen, Vinh P. (Department: 2829)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

C324S1540PB

Reexamination Certificate

active

07436195

ABSTRACT:
A test apparatus for semiconductor elements on a semiconductor wafer has test probes in a test area, which are held by a needle card. The needle card is held by a test area housing which surrounds the test area. Pressure is applied to the test area, and the test area housing floats on an air cushion above the semiconductor wafer. The test area housing has at least three distance sensors, which detect the width of a gap between the test area housing and the semiconductor wafer upper face, and interact with at least three gap control elements. The gap control elements are supported against a stiff test apparatus plate and maintain a predetermined gap width, while the semiconductor wafer is arranged on a test table of the test apparatus.

REFERENCES:
patent: 4014576 (1977-03-01), Druschel et al.
patent: 6756797 (2004-06-01), Brandorff et al.
patent: 6838896 (2005-01-01), Leedy
patent: 6906543 (2005-06-01), Lou et al.
patent: 7233438 (2007-06-01), Tokunaga et al.
patent: 7242204 (2007-07-01), Otaguro et al.

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