Porous film-forming composition, patterning process, and...

Details Porous film-forming composition, patterning process, and... Porous film-forming composition, patterning process, and...

2005-06-09

2008-08-26

Zimmer, Marc S (Department: 1796)

Synthetic resins or natural rubbers -- part of the class 520 ser

Synthetic resins

From silicon reactant having at least one...

C528S027000, C528S029000, C528S043000

Reexamination Certificate

active

07417104

ABSTRACT:
A porous film-forming composition is provided comprising (A) a polymer obtained by hydrolytic condensation of a hydrolyzable silane having formula (1):in-line-formulae description="In-line Formulae" end="lead"?R1n—Si—R24-n  (1)in-line-formulae description="In-line Formulae" end="tail"?wherein R1is a monovalent organic group or hydrogen, R2is a hydrolyzable group or a hydroxyl group and n is an integer of 0 to 3, a hydrolyzate thereof or a partial condensate thereof, with the proviso that at least one silicon compound having an organic crosslinkable group as R1is included, the polymer being capable of crosslinking reaction by the organic crosslinkable group, and (B) an organic solvent. The composition has improved storage stability, filling properties, adhesion and coating uniformity sufficient to form a sacrificial film which is dissolvable in a stripping solution.

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