Non-contact method and apparatus for measurement of leakage...

Details Non-contact method and apparatus for measurement of leakage... Non-contact method and apparatus for measurement of leakage...

2005-08-19

2008-08-19

Nguyen, Vincent Q. (Department: 2858)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

For fault location

C324S765010

Reexamination Certificate

active

07414409

ABSTRACT:
A non-contact apparatus and method for measuring of the leakage current and capacitance of p-n junctions in test structures within scribe lanes of IC product wafers is disclosed. The apparatus has a light source optically coupled with a fiber to a transparent electrode at the end of the fiber, which is brought close to the p-n junction under test. The ac signal generated from the test p-n junction is captured by this transparent and conducting coating electrode. The leakage current of a test p-n junction is determined using the frequency dependence of junction photo-voltage signal and reference signals from a p-n junction with low leakage current and known capacitance.

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patent: 7202691 (2007-04-01), Lagowski et al.
patent: 2005/0219498 (2005-10-01), Mori

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