Deposition of coatings from vaporized reactants

Details Deposition of coatings from vaporized reactants Deposition of coatings from vaporized reactants

1981-05-18

1982-09-28

Kendall, Ralph S.

Coating processes

Coating by vapor, gas, or smoke

Base includes an inorganic compound containing silicon or...

118718, 118719, 118DIG5, C23C 1100, C23C 1312

Patent

active

043518613

ABSTRACT:
A method is provided for fluidizing and vaporizing particulate solid coating reactants by first establishing a fluidized bed of dispersed particulate solid coating reactants and thereafter drawing a volume of fluidizing gas and suspended particulate solid coating reactant to a vaporizer while mixing an additional volume of gas therewith and then vaporizing the dispersed particulate solid coating reactant in the reactant-gas mixture. The reactant-gas mixture is then directed into contact with a substrate to be coated in order to deposit a film thereon.

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