Measuring apparatus for work held by chuck table, and laser...

Details Measuring apparatus for work held by chuck table, and laser... Measuring apparatus for work held by chuck table, and laser...

2008-01-03

2008-09-23

Nguyen, Sang (Department: 2886)

Optics: measuring and testing

Position or displacement

C356S609000, C356S624000, C250S201300, C359S368000, C353S031000

Reexamination Certificate

active

07428062

ABSTRACT:
An apparatus for measuring the height of a work held by a chuck table provided in a machining apparatus, including: a white light source for emitting a white beam of light; a chromatic aberration lens for condensing the white beam emitted from the white light source; a beam splitter which is disposed between the white light source and the chromatic aberration lens and by which a reflected beam of the white beam irradiating the work therewith is split; a first condenser lens for condensing the reflected beam split by the beam splitter; a diffraction grating by which the reflected beam condensed by the first condenser lens is converted into a diffracted beam; a second condenser lens for condensing the diffracted beam diffracted by the diffraction grating; and a wavelength detecting unit for detecting the wavelength of the diffracted beam condensed by the second condenser lens.

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