Sensor having a diaphragm

Details Sensor having a diaphragm Sensor having a diaphragm

2006-08-29

2008-05-27

Allen, Andre J. (Department: 2855)

Measuring and testing

Fluid pressure gauge

Diaphragm

C073S703000, C073S754000

Reexamination Certificate

active

07377175

ABSTRACT:
A sensor hard to break and capable of improving sensitivity is obtained. This sensor comprises an electrode plate and a diaphragm, opposed to the electrode plate, including a first elastic film arranged on a central portion and a second elastic film, arranged at least on a peripheral portion of the first elastic film, made of a material having a lower elastic modulus than the first elastic film.

REFERENCES:
patent: 4523474 (1985-06-01), Browne et al.
patent: 5094109 (1992-03-01), Dean et al.
patent: 5146435 (1992-09-01), Bernstein
patent: 5942693 (1999-08-01), Harms et al.
patent: 6450025 (2002-09-01), Wado et al.
patent: 6598483 (2003-07-01), Miyashita et al.
patent: 7082834 (2006-08-01), Petrova et al.
patent: 7181975 (2007-02-01), Bradley et al.
patent: 60-500841 (1985-05-01), None
patent: WO 84/03410 (1984-08-01), None

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