Electron shower apparatus including filament current control

Details Electron shower apparatus including filament current control Electron shower apparatus including filament current control

1992-03-10

1994-07-12

Berman, Jack I.

Radiant energy

Irradiation of objects or material

Irradiation of semiconductor devices

2504921, 2504923, 2504931, H01J 3704

Patent

active

053291298

ABSTRACT:
There is disclosed an electron shower apparatus which eliminates the adverse effect of a magnetic field on electrons and which provides electrons in sufficient quantity when primary electrons having low energy are employed. In the apparatus, the magnetic field generated by a filament current is decreased or eliminated by pulsing the filament current or by passing a current opposite in direction to the filament current in the vicinity of the filament current.

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patent: 4939360 (1990-07-01), Sakai

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