Gas sensor with attenuated drift characteristic

Details Gas sensor with attenuated drift characteristic Gas sensor with attenuated drift characteristic

2004-03-08

2008-05-13

Larkin, Daniel S. (Department: 2856)

Measuring and testing

Gas analysis

C073S031050

Reexamination Certificate

active

07370511

ABSTRACT:
A sensor with an attenuated drift characteristic, including a layer structure in which a sensing layer has a layer of diffusional barrier material on at least one of its faces. The sensor may for example be constituted as a hydrogen gas sensor including a palladium/yttrium layer structure formed on a micro-hotplate base, with a chromium barrier layer between the yttrium layer and the micro-hotplate, and with a tantalum barrier layer between the yttrium layer and an overlying palladium protective layer. The gas sensor is useful for detection of a target gas in environments susceptible to generation or incursion of such gas, and achieves substantial (e.g., >90%) reduction of signal drift from the gas sensor in extended operation, relative to a corresponding gas sensor lacking the diffusional barrier structure of the invention.

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