Device and method for stacked multi-level uncoupled...

Details Device and method for stacked multi-level uncoupled... Device and method for stacked multi-level uncoupled...

2004-02-15

2008-09-09

Amari, Alessandro (Department: 2872)

Optical: systems and elements

Deflection using a moving element

By moving a reflective element

C359S295000

Reexamination Certificate

active

07423794

ABSTRACT:
A multi-level decoupled micro-actuator device comprising a first level substrate (410), a second level frame (420) stacked on said first level substrate (410), a third level frame (430) stacked on said second level frame (420).

REFERENCES:
patent: 4956619 (1990-09-01), Hornbeck
patent: 5061049 (1991-10-01), Hornbeck
patent: 5535047 (1996-07-01), Hornbeck
patent: 5999303 (1999-12-01), Drake
patent: 6038056 (2000-03-01), Florence et al.
patent: 6388789 (2002-05-01), Bernstein
patent: 6480320 (2002-11-01), Nasiri
patent: 6888656 (2005-05-01), Miyajima et al.
patent: 6914710 (2005-07-01), Novotny et al.
The Lucent LamdaRouter: MEMS Technology of the Future Here Today Mar. 2002 (pp. 75-79), David J Bishop, C. Randy Giles, GP Austin, Lucent Techn.
GLV Applications—spec sheet (2 pages) Silicon Light Machines.
Linearization of Electrostatically Actuated Surface Micromachined 2-D Optical Scanner H. Hiroshi Toshiyoshi, W. Piyawattanametha, C. Chan, M.C. Wu.
Analog Devices (www.analog.com).

Affiliated with

Also associated with

Rating

Device and method for stacked multi-level uncoupled... does not yet have a rating. At this time, there are no reviews or comments for this patent.

If you have personal experience with Device and method for stacked multi-level uncoupled..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Device and method for stacked multi-level uncoupled... will most certainly appreciate the feedback.

Rate now

Comments { 0 }

Profile ID: LFUS-PAI-O-3977808