Porogen material

Details Porogen material Porogen material

2005-03-03

2008-03-11

Ngô, Ngân V. (Department: 2818)

Active solid-state devices (e.g., transistors, solid-state diode

Physical configuration of semiconductor

C257SE23141, C257SE23179, C257SE21524

Reexamination Certificate

active

07342295

ABSTRACT:
A porogen material for forming a dielectric porous film. The porogen material may include a silicon based dielectric precursor and a silicon containing porogen. The porous film may have a substantially uniform dielectric constant value throughout. Methods of forming the porous film as well as semiconductor devices employing circuit features isolated by the porous film are also present.

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