Metal working – Method of mechanical manufacture – Fluid pattern dispersing device making – e.g. – ink jet
Reexamination Certificate
2005-07-13
2008-03-18
Vo, Peter (Department: 3729)
Metal working
Method of mechanical manufacture
Fluid pattern dispersing device making, e.g., ink jet
C029S831000, C029S832000, C029S842000, C029S846000, C216S027000
Reexamination Certificate
active
07343679
ABSTRACT:
A manufacturing method for manufacturing a liquid ejection element substrate for a liquid ejection element for ejecting liquid through an ejection outlet, the liquid ejection element substrate including an energy generating element for generating energy for ejecting the liquid and an electrode for supplying electric power to the energy generating element, includes a step of forming on a front side of the substrate an energy generating element and wiring electrically connecting with the energy generating element; a step of forming a recess in the form of a groove on the side of the substrate at a position where the wiring is formed; a step of forming an embedded electrode electrically connected with the wiring by filling electrode material in the recess; and a step of thinning the substrate at a back side after formation of the embedded electrode to expose the embedded electrode at the back side of the substrate, thus providing an electrode exposed at the back side of the substrate.
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Canon Kabushiki Kaisha
Fitzpatrick ,Cella, Harper & Scinto
Nguyen Tai van
Vo Peter
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