Substrate processing system and substrate processing method

Details Substrate processing system and substrate processing method Substrate processing system and substrate processing method

2004-07-29

2008-07-29

Cleveland, Michael (Department: 1792)

Cleaning and liquid contact with solids

Apparatus

With endless belt work conveyer

Reexamination Certificate

active

07404409

ABSTRACT:
A substrate processing system includes a substrate transfer unit having a plural-wafer conveyer that transfers plural wafers collectively and a single wafer conveyer that transfers a single wafer at a time. The single-wafer conveyer is accessible to the plural-wafer conveyer to deliver and remove a wafer to and from the plural-wafer conveyer.

REFERENCES:
patent: 2001/0025605 (2001-10-01), Nagakura
patent: 2002/0000240 (2002-01-01), Kamikawa
patent: 2002/0037645 (2002-03-01), Matsunaga et al.
patent: 2003/0091410 (2003-05-01), Larson et al.
patent: 11-354604 (1999-12-01), None

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