Contact-type electric capacitive displacement sensor

Details Contact-type electric capacitive displacement sensor Contact-type electric capacitive displacement sensor

2005-08-10

2008-03-25

Cygan, Michael (Department: 2855)

Measuring and testing

Specimen stress or strain, or testing by stress or strain...

Specified electrical sensor or system

Reexamination Certificate

active

07347102

ABSTRACT:
A contact-type electric capacitive displacement sensor includes a stationary element having a stationary plate, a stationary conductive pattern formed on the stationary plate and an insulation film coated on the stationary plate and a displaceable element having a displaceable plate, a displaceable conductive pattern formed on the displaceable plate and an insulation film coated on the displaceable plate. The stationary and the displaceable conductive patterns have a cyclic pattern of conductor to thereby produce a variation of capacitance therebetween when moving relative to each other.

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patent: 2003/0223176 (2003-12-01), Fujii et al.
Moojin Kim et. al.;A Micromachined Displacement Sensor with high Accuracy and Long Range; May 2005; Proc. Of 5theuspen International Conference—Montpellier—France; pp. 157-160.

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