Actuator with reduced drive capacitance

Details Actuator with reduced drive capacitance Actuator with reduced drive capacitance

2004-08-02

2008-03-18

Do, An H. (Department: 2853)

Incremental printing of symbolic information

Ink jet

Ejector mechanism

Reexamination Certificate

active

07344228

ABSTRACT:
Techniques are provided for reducing the amount of power required to activate a piezoelectric actuator of a microelectromechanical structure. An insulating layer is deposited on a piezoelectric layer. The insulating layer is etched to remove a portion of the layer and expose the piezoelectric layer in the etched areas. An electrode layer is deposited on the piezoelectric layer and insulating layer.

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patent: 2004/0108790 (2004-06-01), Junhua et al.
patent: 1 256 450 (2002-11-01), None
patent: 1 350 625 (2003-10-01), None
International Search Report and Written Opinion of the International Searching Authority, International Application Serial No. PCT/US2005/027752, Jan. 24, 2006, 10 pp.

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