Stock material or miscellaneous articles – Composite – Of silicon containing
Reexamination Certificate
2008-05-20
2008-05-20
Moore, Margaret G. (Department: 1796)
Stock material or miscellaneous articles
Composite
Of silicon containing
C528S035000
Reexamination Certificate
active
11710487
ABSTRACT:
A siloxane-based resin having germanium and an interlayer insulating film for a semiconductor device formed using the same. The siloxane-based resins have a low dielectric constant in addition to excellent mechanical properties so that they are useful materials for an insulating film between interconnecting layers of a semiconductor device.
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Lee Sang Kyun
Seon Jong Baek
Harness & Dickey & Pierce P.L.C.
Moore Margaret G.
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