Probing card and inspection apparatus for microstructure

Details Probing card and inspection apparatus for microstructure Probing card and inspection apparatus for microstructure

2008-03-25

2008-03-25

Pert, Evan (Department: 2826)

Electricity: measuring and testing

Fault detecting in electric circuits and of electric components

Of individual circuit component or element

Reexamination Certificate

active

11393953

ABSTRACT:
A probing card and an inspection apparatus which precisely inspect a microstructure having a minute moving section by a simple method are provided. A probing card (6) has a speaker (2), and a circuit substrate (100) which fixes a probe (4), and the speaker (2) is disposed on the circuit substrate (100). The circuit substrate (100) is provided with an aperture region. As the speaker (2) is disposed on that region, a test sound wave is output to the moving section of the microstructure. The probe (4) detects a change in an electrical characteristic caused by the motion of the moving section according to the test sound wave, thereby inspecting the characteristic of the microstructure.

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European Search Report issued in corresponding Application No. 06006889.7 - 1528, dated Jul. 27, 2007.

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