Interferometric optical profiler

Details Interferometric optical profiler Interferometric optical profiler

2008-09-09

2008-09-09

Lyons, Michael A. (Department: 2877)

Optics: measuring and testing

By light interference

Having wavefront division

Reexamination Certificate

active

11015051

ABSTRACT:
An imaging-type interferometric optical profiler splits a beam reflected from a sample into two beam portions. One portion is a reference beam and the other a sample beam. The reference and sample beams are combined to create interference patterns which are used to obtain a surface profile of the sample. Since vibration of the sample causes the same optical path change, and no reference mirror is used, the interferometric optical profiler is relatively vibration-insensitive and has a fast measurement speed.

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