Device and method for stacked multi-level uncoupled...

Optical: systems and elements – Deflection using a moving element – By moving a reflective element

Reexamination Certificate

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C359S295000

Reexamination Certificate

active

10545949

ABSTRACT:
A multi-level decoupled micro-actuator device comprising a first level substrate (410), a second level frame (420) stacked on said first level substrate (410), a third level frame (430) stacked on said second level frame (420).

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