Electricity: motive power systems – Positional servo systems – With particular 'error-detecting' means
Reexamination Certificate
2008-04-01
2008-04-01
Donovan, Lincoln (Department: 2837)
Electricity: motive power systems
Positional servo systems
With particular 'error-detecting' means
C318S135000, C318S432000, C355S053000, C355S072000, C310S012060, C361S139000
Reexamination Certificate
active
11511492
ABSTRACT:
A method of actuating a movable object in a first degree of freedom includes a) providing a first motor assembly including one or more motors of a first type and a second motor assembly including one or more motors of a second type, each of the first and second motor assembles being configured to move the movable object in the first degree of freedom, b) feeding the first motor assembly with a feed-forward signal of a feed-forward unit on the basis of a feed-forward reference signal, and c) feeding the second motor assembly with a control signal of a position control unit on the basis of a position control reference signal.
REFERENCES:
patent: 5528118 (1996-06-01), Lee
patent: 5623853 (1997-04-01), Novak et al.
patent: 6069417 (2000-05-01), Yuan et al.
patent: 6989887 (2006-01-01), Poon et al.
patent: 7113256 (2006-09-01), Butler et al.
patent: 7126674 (2006-10-01), Butler
patent: 7170581 (2007-01-01), Tousain
patent: 2003/0184254 (2003-10-01), Ebihara et al.
patent: 2005/0128160 (2005-06-01), Van Den Biggelaar et al.
patent: 2005/0162802 (2005-07-01), Kho et al.
patent: 2005/0231706 (2005-10-01), Yang et al.
patent: 2006/0061218 (2006-03-01), Hazelton
Butler Hans
Klaassen Franciscus Adrianus Gerardus
ASML Netherlands B.V.
Pillsbury Winthrop Shaw & Pittman LLP
LandOfFree
Method for controlling the position of a movable object, a... does not yet have a rating. At this time, there are no reviews or comments for this patent.
If you have personal experience with Method for controlling the position of a movable object, a..., we encourage you to share that experience with our LandOfFree.com community. Your opinion is very important and Method for controlling the position of a movable object, a... will most certainly appreciate the feedback.
Profile ID: LFUS-PAI-O-3948480