Small thin film movable element, small thin film movable...

Details Small thin film movable element, small thin film movable... Small thin film movable element, small thin film movable...

2008-09-02

2008-09-02

Mack, Ricky L (Department: 2873)

Optical: systems and elements

Optical modulator

Light wave temporal modulation

C359S212100, C359S223100

Reexamination Certificate

active

11482737

ABSTRACT:
A small thin film movable element comprises: a movable portion supported elastically deformably and having a movable electrode at least a portion of the movable portion; and a fixed electrode arranged to be opposed to the movable portion, wherein the movable portion is displaced by an electrostatic force in accordance with a voltage applied to the movable electrode and the fixed electrode, and wherein the movable portion comprises a vibration applying unit that applies a vibration to the movable portion at least immediately before displacing operation of the movable portion.

REFERENCES:
patent: 4507705 (1985-03-01), Hoshino et al.
patent: 6949866 (2005-09-01), Miller et al.
patent: 7141915 (2006-11-01), Takeuchi et al.
patent: 7215061 (2007-05-01), Kihara et al.
patent: 7220009 (2007-05-01), Shimada et al.
patent: 8-334709 (1996-12-01), None
patent: 10-510374 (1998-10-01), None

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